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Abbreviation : PEALD
Long Form : plasma-enhanced ALD
No. Year Title Co-occurring Abbreviation
2020 Surface and interfacial study of atomic layer deposited Al2O3 on MoTe2 and WTe2. ALD
2019 Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition. T-ALD
2018 Surface species during ALD of platinum observed with in situ reflection IR spectroscopy. ALD, FTIR
2017 Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System. LTP, STP, T-ALD
2017 Uniform Growth of Sub-5-Nanometer High-kappa Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition. ALD, FETs, XPS
2015 The Properties of Cu Thin Films on Ru Depending on the ALD Temperature. ALD