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Abbreviation : RALD
Long Form : Rapid atomic layer deposition
No. Year Title Co-occurring Abbreviation
2013 Rapid atomic layer deposition of silica nanolaminates: synergistic catalysis of Lewis/Bronsted acid sites and interfacial interactions. DFT, TMA
2011 Effect of catalyst layer density and growth temperature in rapid atomic layer deposition of silica using tris(tert-pentoxy)silanol. ---